Lam Research Corp - een of andere bedrijf dat handelt in chip-fabricage spullen - heeft vandaag bekend gemaakt dat AMD een order heeft geplaatst voor 0,18micron "Teres(TM) integrated chemical mechanical planarization (CMP) and post-CMP cleaning system". Whatever dat ook mag zijn, hopelijk gaat het voor ons betekenen dat AMD meer, snellere en goedkopere Athlons kan gaan bouwen:
Lam Research Corporation (Nasdaq:LRCX), a leading supplier of wafer fabrication equipment to the worldwide semiconductor industry, today announced a multi-system order from AMD for its Teres(TM) integrated chemical mechanical planarization (CMP) and post-CMP cleaning system.AMD's leading-edge Fab 25 in Austin, Texas, is qualifying the initial system for 0.18 micron shallow trench isolation (STI) for AMD Athlon(TM) processor production. Subsequent systems will add capacity at AMD's Fab 25 and will be used for advanced CMP applications in AMD's Submicron Development Center in Sunnyvale, California.
AMD selected Lam's Teres for 0.18 micron STI direct-polish production and next-generation development because of its superior process performance, flexibility, and control as well as its industry-leading manufacturability. Fab 25's initial Teres system achieved a mean time between failure (MTBF) exceeding 200 hours during its evaluation and after its production release. AMD achieved excellent within-die and across-wafer uniformity as well as very low defect densities.
